| Wafer
Size |
2" |
3" |
4" |
6" |
8" |
12" |
| Diameter
(mm) |
50.8 |
76.2 |
100 |
150 |
200 |
300 |
| Dia
Tolerance (mm) |
±0.5 |
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| Growth |
CZ, FZ |
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| Type/
Dopant |
P/Boron |
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| Orientation |
<100> | |||||
| Thickness
（µm) |
430±25 |
500±25 | 525±25 | 625±25 | 725±25 | 775±25 |
| Flat |
Semi
Standard |
V-Notch |
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| Resistivity (Ωcm) | 0.001~0.5, 0.5~100 Ωcm | |||||
| Front
Side |
Polished | |||||
| Back
side |
Etched | Polished |
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| TTV/Bow/Warp (µm) | 10/50/50 | |||||
| Particle |
30ea @0.3µm |
150ea @0.12µm |
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