| 6H-SiC |
6H-SiC |
4H-SiC |
|
| Orientation |
<0001> |
<0001> |
<0001> |
| Conductivity
Type |
N-Type |
Semi-insulating |
N-Type |
| Dopant |
N2
(Nitrogen) |
N2
(Nitrogen) |
N2
(Nitrogen) |
| Diameter |
ø
2" |
ø 2" | ø 2" |
| Thickness
(µm) |
330 |
330 |
330 |
| Resistivity
ohm-cm |
0.02~0.1 |
>=1E5 |
0.012~0.03 |
| Surface
Finish |
Si
face
polished |
Si
face
polished |
Si
face
polished |
| TTV (µm) | </=25 |
</=25 | </=25 |
| Micropipe
Density |
</=30 |
</=30 |
</=30 |