| Item |
2"
PSS |
4"
PSS |
| Diameter |
50.8±0.25
mm |
100±0.25
mm |
| Thickness |
430±15µm | 430±15µm |
| Orientation |
C-plane (0001) off angle 0.2°±0.1°(M-axis); 0±1° (A-axis) | |
| Flat
Orientation |
16 ±1.0 mm | 30 ±1.0 mm |
| Height |
1.8 ±0.1 µm
(Customized) |
|
| Width |
2.8 ±0.15 µm (Customized) | |
| Pitch |
3 ±0.1 µm |
|